New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping

Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-Atomic Layer Deposition

(2012) M. A. Thomas et al.   ACS Applied Materials & Interfaces

Oriented Growth of Al2O3:ZnO Nanolaminates for Use as Electron-Selective Electrodes in Inverted Polymer Solar Cells

(2012) Hyeunseok Cheun et al.   ADVANCED FUNCTIONAL MATERIALS

Structural, electrical, and optical properties of hydrogen-doped ZnO films

(2012) Achim Kronenberger et al.   PHYSICAL REVIEW B

ALD grown zinc oxide with controllable electrical properties

(2012) E Guziewicz et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Transparent conductive ZnO:Al films grown by atomic layer deposition for Si-wire-based solar cells

(2011) Byeong-Yun Oh et al.   CURRENT APPLIED PHYSICS

Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications

(2011) G. Luka et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition

(2011) Yang Geng et al.   Journal of Physical Chemistry C

Ga-doped ZnO grown by pulsed laser deposition in H2: The roles of Ga and H

(2011) David C. Look et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Thin-film electronics by atomic layer deposition

(2011) David H. Levy et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition of Al-doped ZnO films using ozone as the oxygen source: A comparison of two methods to deliver aluminum

(2011) Hai Yuan et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Surface modification and fabrication of 3D nanostructures by atomic layer deposition

(2011) Changdeuck Bae et al.   MRS BULLETIN

Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films

(2010) Do-Joong Lee et al.   ADVANCED FUNCTIONAL MATERIALS

Effects of deposition temperature on the effectiveness of hydrogen doping in Ga-doped ZnO thin films

(2010) Dong-Ho Kim et al.   JOURNAL OF APPLIED PHYSICS

Effective atomic layer deposition procedure for Al-dopant distribution in ZnO thin films

(2010) Jin Yong Kim et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Transparent and conductive undoped zinc oxide thin films grown by atomic layer deposition

(2010) Grzegorz Luka et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Deposition of Al doped ZnO layers with various electrical types by atomic layer deposition

(2010) Cheol Hyoun Ahn et al.   THIN SOLID FILMS

Defects in ZnO

(2009) M. D. McCluskey et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition of Undoped and Al-Doped ZnO Thin Films Usingthe Zn Alkoxide Precursor Methylzinc Isopropoxide

(2008) Ki-Seok An et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Characteristics of hydrogen co-doped ZnO : Al thin films

(2008) S H Lee et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Preferential growth of ZnO thin films by the atomic layer deposition technique

(2008) Swee-Yong Pung et al.   NANOTECHNOLOGY

Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass

(2008) Hisao Makino et al.   THIN SOLID FILMS

Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes

(2007) Tadatsugu Minami   THIN SOLID FILMS