Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

(2012) Yumi Kawamura et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition

(2011) Yumi Kawamura et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Influence of the active layer thickness on the electrical properties of ZnO thin film transistors fabricated by radio frequency magnetron sputtering

(2011) Hai-Qin Huang et al.   JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS

Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

(2011) Jari Malm et al.   THIN SOLID FILMS

Effect of Post-Thermal Annealing of Thin-Film Transistors with ZnO Channel Layer Fabricated by Atomic Layer Deposition

(2010) Yumi Kawamura et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Characteristics of the ZnO thin film transistor by atomic layer deposition at various temperatures

(2009) Semyung Kwon et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Characteristics of laser-annealed ZnO thin film transistors

(2009) Jun-Je Kim et al.   THIN SOLID FILMS

Enhancement-Mode ZnO Thin-Film Transistor Grown by Metalorganic Chemical Vapor Deposition

(2008) Jungyol Jo et al.   Applied Physics Express

Stable ZnO thin film transistors by fast open air atomic layer deposition

(2008) David H. Levy et al.   APPLIED PHYSICS LETTERS

Enhanced performances of ZnO-TFT by improving surface properties of channel layer

(2008) Liang Zhang et al.   SOLID STATE COMMUNICATIONS

Transparent thin-film transistors with zinc oxide semiconductor fabricated by reactive sputtering using metallic zinc target

(2008) Woo-Seok Cheong et al.   THIN SOLID FILMS

Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition

(2007) A. Wójcik et al.   JOURNAL OF CRYSTAL GROWTH

Effect of thickness of ZnO active layer on ZnO-TFT's characteristics

(2007) J.H. Chung et al.   THIN SOLID FILMS

ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

(2007) S.J. Lim et al.   THIN SOLID FILMS