Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

Published 2013 View Full Article

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Title
Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue 2S, Pages 02BF04
Publisher
Japan Society of Applied Physics
Online
2013-12-21
DOI
10.7567/jjap.51.02bf04
References
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