Changes of Carrier Density and Mobility in ALD-ZnO Thin Films after Nitrogen-ion Implantation

Published 2011 View Full Article

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Title
Changes of Carrier Density and Mobility in ALD-ZnO Thin Films after Nitrogen-ion Implantation
Authors
Keywords
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Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 58, Issue 4, Pages 761-764
Publisher
Korean Physical Society
Online
2011-05-16
DOI
10.3938/jkps.58.761

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