Low-temperature Atomic Layer Deposition of TiO2, Al2O3, and ZnO Thin Films

Published 2011 View Full Article

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Title
Low-temperature Atomic Layer Deposition of TiO2, Al2O3, and ZnO Thin Films
Authors
Keywords
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Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 59, Issue 2(1), Pages 452-457
Publisher
Korean Physical Society
Online
2011-08-05
DOI
10.3938/jkps.59.452

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