Atomic layer deposition of zinc oxide films: Effects of nanocrystalline characteristics on tribological performance

Published 2012 View Full Article

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Title
Atomic layer deposition of zinc oxide films: Effects of nanocrystalline characteristics on tribological performance
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 207, Issue -, Pages 361-366
Publisher
Elsevier BV
Online
2012-07-13
DOI
10.1016/j.surfcoat.2012.07.021

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