Stable p-type ZnO films grown by atomic layer deposition on GaAs substrates and treated by post-deposition rapid thermal annealing

Published 2011 View Full Article

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Title
Stable p-type ZnO films grown by atomic layer deposition on GaAs substrates and treated by post-deposition rapid thermal annealing
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 16, Pages 5558-5561
Publisher
Elsevier BV
Online
2011-03-08
DOI
10.1016/j.tsf.2011.02.072

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