Reproducible growth of p-type ZnO:N using a modified atomic layer deposition process combined with dark annealing

Published 2008 View Full Article

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Title
Reproducible growth of p-type ZnO:N using a modified atomic layer deposition process combined with dark annealing
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 17, Pages 172111
Publisher
AIP Publishing
Online
2008-11-09
DOI
10.1063/1.3000604
References
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