Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD

Title
Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 33, Issue 2, Pages 203-205
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-12-14
DOI
10.1109/led.2011.2174607

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