Ultraviolet photodetector fabricated from atomic-layer-deposited ZnO films

Published 2009 View Full Article

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Title
Ultraviolet photodetector fabricated from atomic-layer-deposited ZnO films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 3, Pages 1765
Publisher
American Vacuum Society
Online
2009-05-31
DOI
10.1116/1.3098502
References
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