Atomic layer deposition of Zn(O,S) thin films with tunable electrical properties by oxygen annealing
Published 2013 View Full Article
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Title
Atomic layer deposition of Zn(O,S) thin films with tunable electrical properties by oxygen annealing
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 13, Pages 132110
Publisher
AIP Publishing
Online
2013-04-06
DOI
10.1063/1.4800928
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