Atomic layer deposition of Zn(O,S) thin films with tunable electrical properties by oxygen annealing

Title
Atomic layer deposition of Zn(O,S) thin films with tunable electrical properties by oxygen annealing
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 13, Pages 132110
Publisher
AIP Publishing
Online
2013-04-06
DOI
10.1063/1.4800928

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