Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications

The influence of carbon on the structure and photoluminescence of amorphous silicon carbonitride thin films

(2017) Z. Khatami et al.   THIN SOLID FILMS

Design of efficient mono-aminosilane precursors for atomic layer deposition of SiO2 thin films

(2017) Liang Huang et al.   RSC Advances

Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid

(2016) Yongmin Kim et al.   ACS Applied Materials & Interfaces

SiNx Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content

(2016) Susann Schmidt et al.   ACS Applied Materials & Interfaces

Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor

(2016) Jae-Min Park et al.   ACS Applied Materials & Interfaces

Time-resolved analysis of the white photoluminescence from chemically synthesized SiCxOy thin films and nanowires

(2016) Natasha Tabassum et al.   APPLIED PHYSICS LETTERS

Synthesis and processing of silicon nitride and related materials using preceramic polymer and non-oxide sol-gel approaches

(2016) Andrew L. Hector   COORDINATION CHEMISTRY REVIEWS

Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor

(2016) Sungin Suh et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane

(2016) Stephen Weeks et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Simple realization of efficient barrier performance of a single layer silicon nitride film via plasma chemistry

(2016) Jun Suk Lee et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films

(2016) D. Dergez et al.   THIN SOLID FILMS

Optical, structural and electrical characterizations of stacked Hf-based and silicon nitride dielectrics

(2016) L. Khomenkova et al.   THIN SOLID FILMS

Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells

(2016) Mark S. Bailly et al.   THIN SOLID FILMS

Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor

(2016) M. Śmietana et al.   THIN SOLID FILMS

Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks

(2016) Xin Meng et al.   Materials

Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride

(2016) Luchana L. Yusup et al.   RSC Advances

Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride

(2016) J. Provine et al.   AIP Advances

Cyclic azasilanes as volatile and reactive precursors for atomic layer deposition of silicon dioxide

(2016) Ling Ju et al.   Journal of Materials Chemistry C

Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers

(2015) Anne-Marije Andringa et al.   ACS Applied Materials & Interfaces

Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma

(2015) Harm C. M. Knoops et al.   ACS Applied Materials & Interfaces

Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma

(2015) Rafaiel A. Ovanesyan et al.   ACS Applied Materials & Interfaces

Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time

(2015) Harm C. M. Knoops et al.   APPLIED PHYSICS LETTERS

Photoluminescence and carrier transport mechanisms of silicon-rich silicon nitride light emitting device

(2015) Wugang Liao et al.   APPLIED SURFACE SCIENCE

Strong visible light emission from silicon-oxycarbide nanowire arrays prepared by electron beam lithography and reactive ion etching

(2015) Vasileios Nikas et al.   JOURNAL OF MATERIALS RESEARCH

Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride

(2015) Chaitanya Krishna Ande et al.   Journal of Physical Chemistry Letters

Phase composition of thin silicon carbonitride films obtained by plazma endanced chemical vapour deposition using organosilicon compounds

(2015) N. I. Fainer et al.   JOURNAL OF STRUCTURAL CHEMISTRY

Permeation barrier performance of Hot Wire-CVD grown silicon-nitride films treated by argon plasma

(2015) S. Majee et al.   THIN SOLID FILMS

Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films

(2015) Manuel Bogner et al.   THIN SOLID FILMS

Mechanical behavior of hard amorphous Si–C–N thin films

(2015) Chunqiang Zhuang et al.   THIN SOLID FILMS

Effect of the stoichiometry of Si-rich silicon nitride thin films on their photoluminescence and structural properties

(2015) T.V. Torchynska et al.   THIN SOLID FILMS

Effect of argon ion energy on the performance of silicon nitride multilayer permeation barriers grown by hot-wire CVD on polymers

(2015) P. Alpuim et al.   THIN SOLID FILMS

Transparent silicon nitride films prepared by surface wave plasma chemical vapor deposition under low temperature conditions

(2015) Kazufumi Azuma et al.   THIN SOLID FILMS

Highly water-impermeable SiNx film prepared using surface-wave-plasma chemical vapor deposition and improvement of the barrier performance for organic light-emitting displays

(2015) Satoko Ueno et al.   THIN SOLID FILMS

Low temperature deposition of silicon nitride using Si3Cl8

(2015) Stefan Riedel et al.   THIN SOLID FILMS

Silicon nitride and intrinsic amorphous silicon double antireflection coatings for thin-film solar cells on foreign substrates

(2015) Da Li et al.   THIN SOLID FILMS

Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films

(2015) D. Dergez et al.   THIN SOLID FILMS

Ceramic Nanocomposites from Tailor-Made Preceramic Polymers

(2015) Gabriela Mera et al.   Nanomaterials

Effect of Reaction Mechanism on Precursor Exposure Time in Atomic Layer Deposition of Silicon Oxide and Silicon Nitride

(2014) Ciaran A. Murray et al.   ACS Applied Materials & Interfaces

Characterization of silicon nitride thin films deposited by reactive sputtering and plasma-enhanced CVD at low temperatures

(2014) Mayumi B. Takeyama et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition

(2014) Woochool Jang et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH3

(2014) Liang Huang et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Microwave Plasma Process for SiCN:H Thin Films Synthesis with Composition Varying from SiC:H to SiN:H in H2/N2/Ar/Hexamethyldisilazane Gas Mixture

(2014) Mohammed Belmahi et al.   Plasma Processes and Polymers

Characterization of SiCN thin films: Experimental and theoretical investigations

(2014) V.I. Ivashchenko et al.   THIN SOLID FILMS

On the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers

(2014) Ferdinandus J.H. van Assche et al.   THIN SOLID FILMS

Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects

(2014) Sean W. King   ECS Journal of Solid State Science and Technology

Heat transport by long mean free path vibrations in amorphous silicon nitride near room temperature

(2013) Rubina Sultan et al.   PHYSICAL REVIEW B

High reliability of vanadyl-phthalocyanine thin-film transistors using silicon nitride gate insulator

(2013) Lijuan Wang et al.   THIN SOLID FILMS

Thermal annealing effect on ultraviolet-light-induced leakage current in low-pressure chemical vapor deposited silicon nitride films

(2013) Kiyoteru Kobayashi et al.   THIN SOLID FILMS

Silicon Micro- and Nanofabrication for Medicine

(2013) Daniel Fine et al.   Advanced Healthcare Materials

Anti-infective and osteointegration properties of silicon nitride, poly(ether ether ketone), and titanium implants

(2012) T.J. Webster et al.   Acta Biomaterialia

Pulsed-radio frequency plasma enhanced chemical vapour deposition of low temperature silicon nitride for thin film transistors

(2012) Arman Ahnood et al.   THIN SOLID FILMS

A review and a fundamental theory of silicon nitride tribochemistry

(2012) Roberto C. Dante et al.   WEAR

Luminescence properties of terbium-doped SiCN thin films by rf magnetron reactive sputtering

(2011) Ziwei Ma et al.   DIAMOND AND RELATED MATERIALS

Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu

(2011) Tae-Kwang Eom et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Plasma enhanced atomic layer deposition of SiNx:H and SiO2

(2011) Sean W. King   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study

(2011) M.A. Signore et al.   OPTICAL MATERIALS

Development of microcrystalline silicon carbide window layers by hot-wire CVD and their applications in microcrystalline silicon thin film solar cells

(2011) Tao Chen et al.   THIN SOLID FILMS

Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition

(2011) Mohd Ragib Badaruddin et al.   THIN SOLID FILMS

Capacitance–voltage characterization of silicon oxide and silicon nitride coatings as passivation layers for crystalline silicon solar cells and investigation of their stability against x-radiation

(2011) Jan Martin Kopfer et al.   THIN SOLID FILMS

Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications

(2011) W. Daves et al.   THIN SOLID FILMS

Formation and photoluminescence of Si nanocrystals in controlled multilayer structure comprising of Si-rich nitride and ultrathin silicon nitride barrier layers

(2011) Yong-Heng So et al.   THIN SOLID FILMS

Evolution of optical properties with deposition time of silicon nitride and diamond-like carbon films deposited by radio-frequency plasma-enhanced chemical vapor deposition method

(2011) Mateusz Smietana et al.   THIN SOLID FILMS

Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition

(2010) Tae-Kwang Eom et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Spin-on silicon-nitride Films for Photo-lithography by RT Cure of Polysilazane

(2010) Ninado Shinde et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures

(2010) Arnab Sankar Bhattacharyya et al.   JOURNAL OF RAMAN SPECTROSCOPY

Intrinsic stress effect on fracture toughness of plasma enhanced chemical vapor deposited SiNx:H films

(2010) Sean King et al.   THIN SOLID FILMS

Dielectric functions of PECVD-grown silicon nanoscale inclusions within rapid thermal annealed silicon-rich silicon nitride films

(2010) A.-S. Keita et al.   THIN SOLID FILMS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

On the effects of thermal treatment on the composition, structure, morphology, and optical properties of hydrogenated amorphous silicon-oxycarbide

(2009) Spyros Gallis et al.   JOURNAL OF MATERIALS RESEARCH

Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz:H system

(2009) S.W. King et al.   MICROELECTRONICS RELIABILITY

Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3

(2009) Kwangchol Park et al.   THIN SOLID FILMS

a-Si:C:H and a-Si:N:H Thin Films Obtained by PECVD for Applications in Silicon Solar Cells

(2008) T. Stapinski et al.   JOURNAL OF ELECTRONIC MATERIALS

Role of silicon on the growth mechanisms of CNx and SiCN thin films by N2/CH4 microwave plasma assisted chemical vapour deposition

(2008) Paul Kouakou et al.   SURFACE & COATINGS TECHNOLOGY

A new fabrication method of low stress PECVD SiNx layers for biomedical applications

(2007) Jiashen Wei et al.   THIN SOLID FILMS