Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers

Published 2015 View Full Article

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Title
Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 7, Issue 40, Pages 22525-22532
Publisher
American Chemical Society (ACS)
Online
2015-09-22
DOI
10.1021/acsami.5b06801

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