Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor

Published 2016 View Full Article

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Title
Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor
Authors
Keywords
Thin film, Silicon nitride, Plasma-enhanced chemical vapor deposition, Long-period gratings, Optical fiber
Journal
THIN SOLID FILMS
Volume 603, Issue -, Pages 8-13
Publisher
Elsevier BV
Online
2016-01-26
DOI
10.1016/j.tsf.2016.01.046

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