SiNx Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content

Published 2016 View Full Article

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Title
SiNx Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 8, Issue 31, Pages 20385-20395
Publisher
American Chemical Society (ACS)
Online
2016-07-14
DOI
10.1021/acsami.6b05830

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