Dielectric functions of PECVD-grown silicon nanoscale inclusions within rapid thermal annealed silicon-rich silicon nitride films

Published 2010 View Full Article

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Title
Dielectric functions of PECVD-grown silicon nanoscale inclusions within rapid thermal annealed silicon-rich silicon nitride films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 9, Pages 2870-2873
Publisher
Elsevier BV
Online
2010-12-12
DOI
10.1016/j.tsf.2010.11.071

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