Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz:H system

Published 2009 View Full Article

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Title
Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz:H system
Authors
Keywords
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Journal
MICROELECTRONICS RELIABILITY
Volume 49, Issue 7, Pages 721-726
Publisher
Elsevier BV
Online
2009-06-29
DOI
10.1016/j.microrel.2009.04.006

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