Spin-on silicon-nitride Films for Photo-lithography by RT Cure of Polysilazane

Published 2010 View Full Article

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Title
Spin-on silicon-nitride Films for Photo-lithography by RT Cure of Polysilazane
Authors
Keywords
-
Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 23, Issue 2, Pages 225-230
Publisher
Technical Association of Photopolymers, Japan
Online
2010-08-05
DOI
10.2494/photopolymer.23.225

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