Thermal annealing effect on ultraviolet-light-induced leakage current in low-pressure chemical vapor deposited silicon nitride films

Published 2013 View Full Article

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Title
Thermal annealing effect on ultraviolet-light-induced leakage current in low-pressure chemical vapor deposited silicon nitride films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 550, Issue -, Pages 545-553
Publisher
Elsevier BV
Online
2013-11-07
DOI
10.1016/j.tsf.2013.10.163

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