Characterization of SiCN thin films: Experimental and theoretical investigations

Published 2014 View Full Article

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Title
Characterization of SiCN thin films: Experimental and theoretical investigations
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 569, Issue -, Pages 57-63
Publisher
Elsevier BV
Online
2014-08-31
DOI
10.1016/j.tsf.2014.08.027

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