Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
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Title
Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
Authors
Keywords
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Journal
RSC Advances
Volume 6, Issue 72, Pages 68515-68524
Publisher
Royal Society of Chemistry (RSC)
Online
2016-07-19
DOI
10.1039/c6ra10909h
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