Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures

Published 2010 View Full Article

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Title
Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures
Authors
Keywords
-
Journal
JOURNAL OF RAMAN SPECTROSCOPY
Volume 41, Issue 10, Pages 1234-1239
Publisher
Wiley
Online
2010-01-19
DOI
10.1002/jrs.2588

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