a-Si:C:H and a-Si:N:H Thin Films Obtained by PECVD for Applications in Silicon Solar Cells

Published 2008 View Full Article

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Title
a-Si:C:H and a-Si:N:H Thin Films Obtained by PECVD for Applications in Silicon Solar Cells
Authors
Keywords
-
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 37, Issue 6, Pages 905-911
Publisher
Springer Nature
Online
2008-03-25
DOI
10.1007/s11664-008-0422-7

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