Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films

Title
Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films
Authors
Keywords
Aluminum nitride, Silicon nitride, Thermal conductivity, Three omega method
Journal
THIN SOLID FILMS
Volume 591, Issue -, Pages 267-270
Publisher
Elsevier BV
Online
2015-04-12
DOI
10.1016/j.tsf.2015.03.031

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