Thin film encapsulation for the organic light-emitting diodes display via atomic layer deposition

Atomic layer deposition (ALD) of subnanometer inorganic layers on natural cotton to enhance oil sorption performance in marine environments

(2019) Andrew E. Short et al.   JOURNAL OF MATERIALS RESEARCH

Multiple short pulse process for low-temperature atomic layer deposition and its transient steric hindrance

(2019) Haoran Wang et al.   APPLIED PHYSICS LETTERS

PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads

(2018) Maximilian Gebhard et al.   ACS Applied Materials & Interfaces

Pt thermal atomic layer deposition for silicon x-ray micropore optics

(2018) Kazuma Takeuchi et al.   APPLIED OPTICS

Encapsulation requirements to enable stable organic ultra-thin and stretchable devices

(2018) Vera Steinmann et al.   JOURNAL OF MATERIALS RESEARCH

Efficient multi-barrier thin film encapsulation of OLED using alternating Al2O3 and polymer layers

(2018) Jie Wu et al.   RSC Advances

Effect of Various Oxidants on Reaction Mechanisms, Self-Limiting Natures and Structural Characteristics of Al2 O3 Films Grown by Atomic Layer Deposition

(2018) Haoran Wang et al.   Advanced Materials Interfaces

Design of Highly Water-Resistant, Impermeable, and Flexible Thin-Film Encapsulation Based on Inorganic/Organic Hybrid Layers

(2018) Jeong Hyun Kwon et al.   ACS Applied Materials & Interfaces

Robust Transparent and Conductive Gas Diffusion Multibarrier Based on Mg- and Al-Doped ZnO as Indium Tin Oxide-Free Electrodes for Organic Electronics

(2018) Jeong Hyun Kwon et al.   ACS Applied Materials & Interfaces

Review of Organic/Inorganic Thin Film Encapsulation by Atomic Layer Deposition for a Flexible OLED Display

(2018) Seunghwan Lee et al.   JOM

Ultra Gas-Proof Polymer Hybrid Thin Layer

(2018) Lynn Lee et al.   NANO LETTERS

Toward high volume solution based roll-to-roll processing of OLEDs

(2017) Robert Abbel et al.   JOURNAL OF MATERIALS RESEARCH

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

(2017) Oili M. E. Ylivaara et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Low-temperature-atomic-layer-deposition of SiO2 using various organic precursors

(2017) Sehyoung Ahn et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources

(2017) Sebastian Franke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

A mechanically enhanced hybrid nano-stratified barrier with a defect suppression mechanism for highly reliable flexible OLEDs

(2017) Eun Gyo Jeong et al.   Nanoscale

High-performance thin-film encapsulation for organic light-emitting diodes

(2017) Peter van de Weijer et al.   ORGANIC ELECTRONICS

Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition

(2017) Xiaolei Wang et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Enhanced moisture barrier performance for ALD-encapsulated OLEDs by introducing an organic protective layer

(2017) Lei Wang et al.   Journal of Materials Chemistry C

Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes

(2017) Zheng Chen et al.   Scientific Reports

Laminated Graphene Films for Flexible Transparent Thin Film Encapsulation

(2016) Hong-Kyu Seo et al.   ACS Applied Materials & Interfaces

Stress Management in Thin-Film Gas-Permeation Barriers

(2016) Andreas Behrendt et al.   ACS Applied Materials & Interfaces

Electrical evaluation of crack generation in SiN x and SiO x N y thin-film encapsulation layers for OLED displays

(2016) Eun Kil Park et al.   APPLIED SURFACE SCIENCE

Defect analysis in low temperature atomic layer deposited Al2O3 and physical vapor deposited SiO barrier films and combination of both to achieve high quality moisture barriers

(2016) Tony Maindron et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition of ZnO/TiO2 nanolaminates

(2016) Rong Chen et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Recent progress on thin-film encapsulation technologies for organic electronic devices

(2016) Duan Yu et al.   OPTICS COMMUNICATIONS

Characteristics of Al2O3/ZrO2 laminated films deposited by ozone-based atomic layer deposition for organic device encapsulation

(2016) Juhong Oh et al.   THIN SOLID FILMS

Improved Corrosion Resistance and Mechanical Properties of CrN Hard Coatings with an Atomic Layer Deposited Al2O3 Interlayer

(2015) Zhixin Wan et al.   ACS Applied Materials & Interfaces

Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma

(2015) Rafaiel A. Ovanesyan et al.   ACS Applied Materials & Interfaces

Engineering the mechanical properties of ultrabarrier films grown by atomic layer deposition for the encapsulation of printed electronics

(2015) A. Bulusu et al.   JOURNAL OF APPLIED PHYSICS

Study on Structural, Mechanical, and Optical Properties of Al2O3–TiO2 Nanolaminates Prepared by Atomic Layer Deposition

(2015) Igor Iatsunskyi et al.   Journal of Physical Chemistry C

Spatial atomic layer deposition on flexible substrates using a modular rotating cylinder reactor

(2015) Kashish Sharma et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Thickness dependent barrier performance of permeation barriers made from atomic layer deposited alumina for organic devices

(2015) Hannes Klumbies et al.   ORGANIC ELECTRONICS

Optical properties of ultrathin Al2O3/ZnO nanolaminates

(2015) R. Viter et al.   THIN SOLID FILMS

Development of an Intermediate Layer for Highly Reliable Encapsulation Structures for OLED Displays

(2015) Satoko Ueno et al.   ECS Journal of Solid State Science and Technology

A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers

(2015) Wang Xiao et al.   Nanoscale Research Letters

Thin-Film Barrier Performance of Zirconium Oxide Using the Low-Temperature Atomic Layer Deposition Method

(2014) Yu Duan et al.   ACS Applied Materials & Interfaces

Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition

(2014) Lae Ho Kim et al.   ACS Applied Materials & Interfaces

Implications of Permeation through Intrinsic Defects in Graphene on the Design of Defect-Tolerant Membranes for Gas Separation

(2014) Michael S. H. Boutilier et al.   ACS Nano

Optimization of Al2O3 Films Deposited by ALD at Low Temperatures for OLED Encapsulation

(2014) Yang Yong-Qiang et al.   Journal of Physical Chemistry C

Emerging challenges and materials for thermal management of electronics

(2014) Arden L. Moore et al.   Materials Today

OLED compatible water-based nanolaminate encapsulation systems using ozone based starting layer

(2014) Aarti Singh et al.   ORGANIC ELECTRONICS

Fabrication of tunable [Al2O3:Alucone] thin-film encapsulations for top-emitting organic light-emitting diodes with high performance optical and barrier properties

(2014) Sun Feng-Bo et al.   ORGANIC ELECTRONICS

High barrier properties of transparent thin-film encapsulations for top emission organic light-emitting diodes

(2014) Yang Yong-Qiang et al.   ORGANIC ELECTRONICS

Transparent Conductive Gas-Permeation Barriers on Plastics by Atomic Layer Deposition

(2013) Chun-Ting Chou et al.   ADVANCED MATERIALS

Barrier performance optimization of atomic layer deposited diffusion barriers for organic light emitting diodes using x-ray reflectivity investigations

(2013) Aarti Singh et al.   APPLIED PHYSICS LETTERS

Mechanisms and reactions during atomic layer deposition on polymers

(2013) Gregory N. Parsons et al.   COORDINATION CHEMISTRY REVIEWS

Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition

(2013) Sanghun Lee et al.   CURRENT APPLIED PHYSICS

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Realization of Thin Film Encapsulation by Atomic Layer Deposition of Al2O3 at Low Temperature

(2013) Yong-Qiang Yang et al.   Journal of Physical Chemistry C

Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities

(2013) Han Zhou et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Analysis of thermal degradation of organic light-emitting diodes with infrared imaging and impedance spectroscopy

(2013) Kiyeol Kwak et al.   OPTICS EXPRESS

Thin film encapsulation for organic light emitting diodes using a multi-barrier composed of MgO prepared by atomic layer deposition and hybrid materials

(2013) Eungtaek Kim et al.   ORGANIC ELECTRONICS

Development of highly flexible and ultra-low permeation rate thin-film barrier structure for organic electronics

(2013) Namsu Kim et al.   THIN SOLID FILMS

Gas diffusion barrier characteristics of Al2O3/alucone films formed using trimethylaluminum, water and ethylene glycol for organic light emitting diode encapsulation

(2013) Minwoo Park et al.   THIN SOLID FILMS

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

(2013) Oili M.E. Ylivaara et al.   THIN SOLID FILMS

Thermally Evaporated SiO Thin Films As a Versatile Interlayer for Plasma-Based OLED Passivation

(2012) Won Min Yun et al.   ACS Applied Materials & Interfaces

Alucone Interlayers to Minimize Stress Caused by Thermal Expansion Mismatch between Al2O3 Films and Teflon Substrates

(2012) Shih-Hui Jen et al.   ACS Applied Materials & Interfaces

A model-based methodology for the analysis and design of atomic layer deposition processes—Part I: Mechanistic modelling of continuous flow reactors

(2012) A. Holmqvist et al.   CHEMICAL ENGINEERING SCIENCE

Molecular Layer Deposition of Titanicone Films using TiCl4 and Ethylene Glycol or Glycerol: Growth and Properties

(2012) Aziz I. Abdulagatov et al.   CHEMISTRY OF MATERIALS

Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition

(2012) Byoung H. Lee et al.   Journal of Physical Chemistry C

Extremely efficient flexible organic light-emitting diodes with modified graphene anode

(2012) Tae-Hee Han et al.   Nature Photonics

First-principles simulation and experimental evidence for improvement of transmittance in ZnO films

(2012) Dong-yan ZHANG et al.   Progress in Natural Science-Materials International

Stability of 8-hydroxyquinoline aluminum films encapsulated by a single Al2O3 barrier deposited by low temperature atomic layer deposition

(2012) Tony Maindron et al.   THIN SOLID FILMS

Water permeation through organic–inorganic multilayer thin films

(2012) Seung-Woo Seo et al.   THIN SOLID FILMS

Bendability optimization of flexible optical nanoelectronics via neutral axis engineering

(2012) Sangmin Lee et al.   Nanoscale Research Letters

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

(2011) A. Illiberi et al.   ACS Applied Materials & Interfaces

High-Performance Two-Dimensional Polydiacetylene with a Hybrid Inorganic-Organic Structure

(2011) Sangho Cho et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Properties of AlN grown by plasma enhanced atomic layer deposition

(2011) Markus Bosund et al.   APPLIED SURFACE SCIENCE

Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition

(2011) Shih-Hui Jen et al.   JOURNAL OF APPLIED PHYSICS

Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks

(2011) W. Keuning et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Flexible OLEDs and organic electronics

(2011) Jang-Joo Kim et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Large-area OLED lightings and their applications

(2011) J W Park et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Thin film encapsulation for flexible AM-OLED: a review

(2011) Jin-Seong Park et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Properties of polyimide/Al2O3 and Si3N4 deposited thin films

(2011) Mei-Hui Tsai et al.   THIN SOLID FILMS

Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition

(2011) Cagla Ozgit et al.   THIN SOLID FILMS

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

(2010) Paul Poodt et al.   ADVANCED MATERIALS

The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition

(2010) J. Meyer et al.   APPLIED PHYSICS LETTERS

Highly conformal SiO2/Al2O3nanolaminate gas-diffusion barriers for large-area flexible electronics applications

(2010) Jin-Hwan Choi et al.   NANOTECHNOLOGY

Heat transfer property of thin-film encapsulation for OLEDs

(2010) Jongwoon Park et al.   ORGANIC ELECTRONICS

Formation of Organic Nanoscale Laminates and Blends by Molecular Layer Deposition

(2009) Paul W. Loscutoff et al.   ACS Nano

Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition

(2009) David C. Miller et al.   ACTA MATERIALIA

Al2O3/ZrO2Nanolaminates as Ultrahigh Gas-Diffusion Barriers-A Strategy for Reliable Encapsulation of Organic Electronics

(2009) Jens Meyer et al.   ADVANCED MATERIALS

Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

(2009) Mahriah E. Alf et al.   ADVANCED MATERIALS

Reliable thin film encapsulation for organic light emitting diodes grown by low-temperature atomic layer deposition

(2009) J. Meyer et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

“Zincone” Zinc Oxide−Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition

(2009) Qing Peng et al.   CHEMISTRY OF MATERIALS

Studies of the degradation mechanism of organic light-emitting diodes based on tris(8-quinolinolate)aluminum Alq and 2-tert-butyl-9,10-di(2-naphthyl)anthracene TBADN

(2009) Viktor V. Jarikov et al.   JOURNAL OF APPLIED PHYSICS

The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates

(2009) David C. Miller et al.   JOURNAL OF APPLIED PHYSICS

Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

(2009) P. F. Carcia et al.   JOURNAL OF APPLIED PHYSICS

Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes

(2009) Xuesong Li et al.   NANO LETTERS

White organic light-emitting diodes with fluorescent tube efficiency

(2009) Sebastian Reineke et al.   NATURE

Pyridine-Containing Triphenylbenzene Derivatives with High Electron Mobility for Highly Efficient Phosphorescent OLEDs

(2008) Shi-Jian Su et al.   ADVANCED MATERIALS

Stable ZnO thin film transistors by fast open air atomic layer deposition

(2008) David H. Levy et al.   APPLIED PHYSICS LETTERS

Rapid SiO2Atomic Layer Deposition Using Tris(tert-pentoxy)silanol

(2008) B. B. Burton et al.   CHEMISTRY OF MATERIALS

Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol

(2008) A. A. Dameron et al.   CHEMISTRY OF MATERIALS

Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition

(2008) Arrelaine A. Dameron et al.   Journal of Physical Chemistry C

Molecular Layer Deposition of Poly(p-phenylene terephthalamide) Films Using Terephthaloyl Chloride andp-Phenylenediamine

(2008) N. M. Adamczyk et al.   LANGMUIR

Improved bi-layer lift-off process for MEMS applications

(2008) Jinxing Liang et al.   MICROELECTRONIC ENGINEERING