Stable ZnO thin film transistors by fast open air atomic layer deposition

Published 2008 View Full Article

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Title
Stable ZnO thin film transistors by fast open air atomic layer deposition
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 19, Pages 192101
Publisher
AIP Publishing
Online
2008-05-14
DOI
10.1063/1.2924768
References
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