Properties of AlN grown by plasma enhanced atomic layer deposition

Title
Properties of AlN grown by plasma enhanced atomic layer deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 17, Pages 7827-7830
Publisher
Elsevier BV
Online
2011-04-20
DOI
10.1016/j.apsusc.2011.04.037

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