Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

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(2018)   ADVANCED FUNCTIONAL MATERIALS

Atomic Layer Deposition of Al2O3 and ZnO at Atmospheric Pressure in a Flow Tube Reactor

(2011) Jesse. S. Jur et al.   ACS Applied Materials & Interfaces

An atomic layer deposition process for moving flexible substrates

(2011) P.S. Maydannik et al.   CHEMICAL ENGINEERING JOURNAL

Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head

(2011) P. Ryan Fitzpatrick et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition

(2011) Jonathan R. Bakke et al.   Nanoscale

Making inert polypropylene fibers chemically responsive by combining atomic layer deposition and vapor phase chemical grafting

(2011) Qing Peng et al.   NANOTECHNOLOGY

Patterned deposition by plasma enhanced spatial atomic layer deposition

(2011) Paul Poodt et al.   Physica Status Solidi-Rapid Research Letters

Spatially separated atomic layer deposition of Al2O3, a new option for high-throughput Si solar cell passivation

(2011) B. Vermang et al.   PROGRESS IN PHOTOVOLTAICS

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

(2010) Paul Poodt et al.   ADVANCED MATERIALS

Very low surface recombination velocities on p- and n-type c-Si by ultrafast spatial atomic layer deposition of aluminum oxide

(2010) Florian Werner et al.   APPLIED PHYSICS LETTERS

Preparation of highly hydrophobic and lipophobic cellulose fibers by a straightforward gas–solid reaction

(2010) Ana Gisela Cunha et al.   JOURNAL OF COLLOID AND INTERFACE SCIENCE

Plasmonics for improved photovoltaic devices

(2010) Harry A. Atwater et al.   NATURE MATERIALS

Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers

(2009) Steven M. George et al.   ACCOUNTS OF CHEMICAL RESEARCH

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

(2009) P. F. Carcia et al.   JOURNAL OF APPLIED PHYSICS

Oxide Electronics by Spatial Atomic Layer Deposition

(2009) David H. Levy et al.   Journal of Display Technology

Structural Properties and Antibacterial Effects of Hydrophobic and Oleophobic Sol−Gel Coatings for Cotton Fabrics

(2009) Aljaž Vilčnik et al.   LANGMUIR

Atomic Layer Deposition and Abrupt Wetting Transitions on Nonwoven Polypropylene and Woven Cotton Fabrics

(2009) G. Kevin Hyde et al.   LANGMUIR

Fiber based organic photovoltaic devices

(2008) Brendan O’Connor et al.   APPLIED PHYSICS LETTERS

High efficiency n-type Si solar cells on Al2O3-passivated boron emitters

(2008) Jan Benick et al.   APPLIED PHYSICS LETTERS

Stable ZnO thin film transistors by fast open air atomic layer deposition

(2008) David H. Levy et al.   APPLIED PHYSICS LETTERS

Silicon surface passivation by atomic layer deposited Al2O3

(2008) B. Hoex et al.   JOURNAL OF APPLIED PHYSICS

Surface passivation of high-efficiency silicon solar cells by atomic-layer-deposited Al2O3

(2008) J. Schmidt et al.   PROGRESS IN PHOTOVOLTAICS