High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

Published 2010 View Full Article

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Title
High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 22, Issue 32, Pages 3564-3567
Publisher
Wiley
Online
2010-07-21
DOI
10.1002/adma.201000766

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