A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers
Published 2015 View Full Article
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Title
A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers
Authors
Keywords
Thin film encapsulation, Water vapor transmission rate, Molecular layer deposition, Low-temperature atomic layer deposition
Journal
Nanoscale Research Letters
Volume 10, Issue 1, Pages -
Publisher
Springer Nature
Online
2015-03-13
DOI
10.1186/s11671-015-0838-y
References
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