Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition

Published 2012 View Full Article

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Title
Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 116, Issue 5, Pages 3250-3257
Publisher
American Chemical Society (ACS)
Online
2012-01-10
DOI
10.1021/jp209003h

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