Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition

Published 2008 View Full Article

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Title
Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 112, Issue 12, Pages 4573-4580
Publisher
American Chemical Society (ACS)
Online
2008-03-05
DOI
10.1021/jp076866+

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