Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition

Published 2009 View Full Article

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Title
Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 57, Issue 17, Pages 5083-5092
Publisher
Elsevier BV
Online
2009-08-07
DOI
10.1016/j.actamat.2009.07.015

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