Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics

Published 2011 View Full Article

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Title
Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 1, Pages 01A142
Publisher
American Vacuum Society
Online
2011-12-10
DOI
10.1116/1.3667113
References
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