Highly conformal SiO2/Al2O3nanolaminate gas-diffusion barriers for large-area flexible electronics applications

Published 2010 View Full Article

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Title
Highly conformal SiO2/Al2O3nanolaminate gas-diffusion barriers for large-area flexible electronics applications
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 47, Pages 475203
Publisher
IOP Publishing
Online
2010-10-30
DOI
10.1088/0957-4484/21/47/475203

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