Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Title
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 552, Issue -, Pages 124-135
Publisher
Elsevier BV
Online
2013-12-07
DOI
10.1016/j.tsf.2013.11.112

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