Thin-Film Barrier Performance of Zirconium Oxide Using the Low-Temperature Atomic Layer Deposition Method

Published 2014 View Full Article

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Title
Thin-Film Barrier Performance of Zirconium Oxide Using the Low-Temperature Atomic Layer Deposition Method
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 6, Issue 6, Pages 3799-3804
Publisher
American Chemical Society (ACS)
Online
2014-03-06
DOI
10.1021/am500288q

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