Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol

Published 2008 View Full Article

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Title
Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 20, Issue 10, Pages 3315-3326
Publisher
American Chemical Society (ACS)
Online
2008-04-29
DOI
10.1021/cm7032977

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