Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities
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Title
Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 4, Pages 040801
Publisher
American Vacuum Society
Online
2013-05-21
DOI
10.1116/1.4804609
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