Engineering the mechanical properties of ultrabarrier films grown by atomic layer deposition for the encapsulation of printed electronics
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Title
Engineering the mechanical properties of ultrabarrier films grown by atomic layer deposition for the encapsulation of printed electronics
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 118, Issue 8, Pages 085501
Publisher
AIP Publishing
Online
2015-08-29
DOI
10.1063/1.4928855
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