Engineering the mechanical properties of ultrabarrier films grown by atomic layer deposition for the encapsulation of printed electronics

Title
Engineering the mechanical properties of ultrabarrier films grown by atomic layer deposition for the encapsulation of printed electronics
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 118, Issue 8, Pages 085501
Publisher
AIP Publishing
Online
2015-08-29
DOI
10.1063/1.4928855

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