Optimization of Al2O3 Films Deposited by ALD at Low Temperatures for OLED Encapsulation

Title
Optimization of Al2O3 Films Deposited by ALD at Low Temperatures for OLED Encapsulation
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 118, Issue 32, Pages 18783-18787
Publisher
American Chemical Society (ACS)
Online
2014-07-21
DOI
10.1021/jp505974j

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