Molecular Layer Deposition of Titanicone Films using TiCl4 and Ethylene Glycol or Glycerol: Growth and Properties

Title
Molecular Layer Deposition of Titanicone Films using TiCl4 and Ethylene Glycol or Glycerol: Growth and Properties
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 24, Issue 15, Pages 2854-2863
Publisher
American Chemical Society (ACS)
Online
2012-06-29
DOI
10.1021/cm300162v

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