Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition

Title
Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 7, Pages 2750-2755
Publisher
Elsevier BV
Online
2011-12-08
DOI
10.1016/j.tsf.2011.11.081

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