Nanoimprint lithography: 2D or not 2D? A review

Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration

(2015) R. Kirchner et al.   MICROELECTRONIC ENGINEERING

Nanoimprinting Techniques for Large-Area Three-Dimensional Negative Index Metamaterials with Operation in the Visible and Telecom Bands

(2014) Li Gao et al.   ACS Nano

Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

(2014) Helmut Schift et al.   Journal of Micro-Nanolithography MEMS and MOEMS

Energy-based thermal reflow simulation for 3D polymer shape prediction using Surface Evolver

(2014) R Kirchner et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Advanced scanning probe lithography

(2014) Ricardo Garcia et al.   Nature Nanotechnology

A review of roll-to-roll nanoimprint lithography

(2014) Nazrin Kooy et al.   Nanoscale Research Letters

Biologically Inspired Omniphobic Surfaces by Reverse Imprint Lithography

(2013) René Hensel et al.   ADVANCED MATERIALS

Controlled angular redirection of light via nanoimprinted disordered gratings

(2013) Thomas Buß et al.   APPLIED OPTICS

Innovative and Tailor-made Resist and Working Stamp Materials for Advancing NIL-based Production Technology

(2013) Arne Schleunitz et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Directed self-assembly of block copolymers for use in bit patterned media fabrication

(2013) Rhys Alun Griffiths et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers

(2013) Xiaolin Wang et al.   MICROELECTRONIC ENGINEERING

High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning

(2013) Andreas Finn et al.   MICROELECTRONIC ENGINEERING

Three dimensional on 300mm wafer scale nano imprint lithography processes

(2013) S. Landis et al.   MICROELECTRONIC ENGINEERING

High-efficiency InGaN-based LEDs grown on patterned sapphire substrates using nanoimprinting technology

(2013) Yeeu-Chang Lee et al.   MICROELECTRONIC ENGINEERING

Challenges with high aspect ratio nanoimprint

(2013) Hella-Christin Scheer et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Sub-15 nm linewidth gratings using roll-to-roll nanoimprinting and plasma trimming to fabricate flexible wire-grid polarizers with low colour shift

(2013) Chien-Li Wu et al.   NANOTECHNOLOGY

Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography

(2013) Gianluca Grenci et al.   SENSORS AND ACTUATORS A-PHYSICAL

Large-scale fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by soft UV-nanoimprint lithography

(2013) Lin Cui et al.   Nanoscale Research Letters

Microoptics for efficient redirection of sunlight

(2012) Stephan Klammt et al.   APPLIED OPTICS

Tapered gold-helix metamaterials as improved circular polarizers

(2012) Justyna K. Gansel et al.   APPLIED PHYSICS LETTERS

Extension of the natural element method to surface tension and wettability for the simulation of polymer flows at the micro and nano scales

(2012) Hubert Teyssèdre et al.   JOURNAL OF NON-NEWTONIAN FLUID MECHANICS

Pilot Production of Photonic Devices by Roll-to-Roll Nanoimprinting

(2012) Tapio Makela et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography

(2012) T. Haatainen et al.   MICROELECTRONIC ENGINEERING

Thermal nanoimprint resist for the fabrication of high-aspect-ratio patterns

(2012) M. Messerschmidt et al.   MICROELECTRONIC ENGINEERING

Liquid transfer nanoimprint replication on non-flat surfaces for optical applications

(2012) Christian Moormann et al.   MICROELECTRONIC ENGINEERING

Roll-to-roll pilot nanoimprinting process for backlight devices

(2012) Tapio Mäkelä et al.   MICROELECTRONIC ENGINEERING

Engineering metallic nanostructures for plasmonics and nanophotonics

(2012) Nathan C Lindquist et al.   REPORTS ON PROGRESS IN PHYSICS

Fabrication of elastomeric high-aspect-ratio microstructures using polydimethylsiloxane (PDMS) double casting technique

(2012) Guocheng Shao et al.   SENSORS AND ACTUATORS A-PHYSICAL

Redirection of sunlight by microstructured components – Simulation, fabrication and experimental results

(2012) Stephan Klammt et al.   SOLAR ENERGY

Analysis and characterization of demolding of hot embossed polymer microstructures

(2011) Matthew E Dirckx et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol–gel relief on a metal backbone

(2011) Arne Schleunitz et al.   MICROELECTRONIC ENGINEERING

Press and release imprint: Control of the flexible mold deformation and the local variation of residual layer thickness in soft UV-NIL

(2011) Namil Koo et al.   MICROELECTRONIC ENGINEERING

Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device

(2011) Tapio Mäkelä et al.   MICROELECTRONIC ENGINEERING

Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

(2011) Fantao Meng et al.   MICROELECTRONIC ENGINEERING

Inclined nanoimprinting lithography for 3D nanopatterning

(2011) Zhan Liu et al.   NANOTECHNOLOGY

Improved performance of polarization-stable VCSELs by monolithic sub-wavelength gratings produced by soft nano-imprint lithography

(2011) M A Verschuuren et al.   NANOTECHNOLOGY

Single and multilayer metamaterials fabricated by nanoimprint lithography

(2011) I Bergmair et al.   NANOTECHNOLOGY

Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

(2010) Arne Schleunitz et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

UV-Nanoimprint Lithography (NIL) Process Simulation

(2010) Yoshihiko Hirai   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

3D structuring of polymer parts using thermoforming processes

(2010) T. Senn et al.   MICROELECTRONIC ENGINEERING

Fabrication of 3D patterns with vertical and sloped sidewalls by grayscale electron-beam lithography and thermal annealing

(2010) Arne Schleunitz et al.   MICROELECTRONIC ENGINEERING

Shape control of polymer reflow structures fabricated by nanoimprint lithography

(2010) Helmut Schift et al.   MICROELECTRONIC ENGINEERING

Cones fabricated by 3D nanoimprint lithography for highly sensitive surface enhanced Raman spectroscopy

(2010) Wei Wu et al.   NANOTECHNOLOGY

Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating

(2010) Sergey Gorelick et al.   NANOTECHNOLOGY

Nanoscale Three-Dimensional Patterning of Molecular Resists by Scanning Probes

(2010) D. Pires et al.   SCIENCE

Surface patterned polymer micro-cantilever arrays for sensing

(2010) Prabitha Urwyler et al.   SENSORS AND ACTUATORS A-PHYSICAL

Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

(2009) Se Hyun Ahn et al.   ACS Nano

Demolding temperature in thermal nanoimprint lithography

(2009) Sunggook Park et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Surface plasmon resonance in near-field coupled gold cylinder arrays fabricated by EUV-interference lithography and hot embossing

(2009) P.K. Sahoo et al.   APPLIED SURFACE SCIENCE

Fine Pattern Fabrication by the Molded Mask Method (Nanoimprint Lithography) in the 1970s

(2009) Susumu Fujimori   JAPANESE JOURNAL OF APPLIED PHYSICS

Roll-to-roll manufacturing of electronics on flexible substrates using self-aligned imprint lithography (SAIL)

(2009) Han-Jun Kim et al.   Journal of the Society for Information Display

Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography

(2009) Helmut Schift et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing

(2009) Ran Ji et al.   MICROELECTRONIC ENGINEERING

3D visualization of mold filling stages in thermal nanoimprint by white light interferometry and atomic force microscopy

(2009) Helmut Schift et al.   NANOTECHNOLOGY

A Hybrid Three-Dimensional Nanofabrication Method for Producing Vascular Tissue Engineering Scaffold

(2008) Nikolaj Gadegaard et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process

(2008) Hideki Takagi et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

High-aspect-ratio nanopillar structures fabricated by nanoimprinting with elongation phenomenon

(2008) Kosuke Kuwabara et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Nanoimprint lithography: An old story in modern times? A review

(2008) Helmut Schift   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Measurement of demolding forces in full wafer thermal nanoimprint

(2008) Vera Trabadelo et al.   MICROELECTRONIC ENGINEERING

Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography

(2008) S. Merino et al.   MICROELECTRONIC ENGINEERING

Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography

(2008) Yoshihiko Hirai et al.   MICROELECTRONIC ENGINEERING

Moulding of arrowhead structures

(2008) S. Möllenbeck et al.   MICROELECTRONIC ENGINEERING

The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography

(2008) Namil Koo et al.   NANOTECHNOLOGY