Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol–gel relief on a metal backbone

Published 2011 View Full Article

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Title
Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol–gel relief on a metal backbone
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2113-2116
Publisher
Elsevier BV
Online
2011-02-11
DOI
10.1016/j.mee.2011.02.019

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