Nanoimprint lithography: An old story in modern times? A review

Published 2008 View Full Article

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Title
Nanoimprint lithography: An old story in modern times? A review
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 2, Pages 458
Publisher
American Vacuum Society
Online
2008-04-18
DOI
10.1116/1.2890972

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