UV-Nanoimprint Lithography (NIL) Process Simulation

Published 2010 View Full Article

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Title
UV-Nanoimprint Lithography (NIL) Process Simulation
Authors
Keywords
-
Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 23, Issue 1, Pages 25-32
Publisher
Technical Association of Photopolymers, Japan
Online
2010-07-16
DOI
10.2494/photopolymer.23.25

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