Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Published 2010 View Full Article

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Title
Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 9, Pages 095002
Publisher
IOP Publishing
Online
2010-08-07
DOI
10.1088/0960-1317/20/9/095002
References
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