Challenges with high aspect ratio nanoimprint

Published 2013 View Full Article

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Title
Challenges with high aspect ratio nanoimprint
Authors
Keywords
Contact Angle, High Aspect Ratio, Cohesional Energy, Adhesional Energy, Laplace Pressure
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 20, Issue 10-11, Pages 1891-1898
Publisher
Springer Nature
Online
2013-11-22
DOI
10.1007/s00542-013-1968-8
References
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