Inclined nanoimprinting lithography for 3D nanopatterning

Published 2011 View Full Article

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Title
Inclined nanoimprinting lithography for 3D nanopatterning
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 22, Issue 22, Pages 225302
Publisher
IOP Publishing
Online
2011-04-05
DOI
10.1088/0957-4484/22/22/225302

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